红外与激光工程
2022, 51(10): 20220685
中北大学 仪器与电子学院 动态测试技术省部共建国家重点实验室，太原 030051
提出并实验验证了一种全石英光纤法布里-珀罗高温动态压力传感器，利用MEMS技术及三层石英玻璃高温热压键合技术实现了传感器敏感单元的批量化制造。为了减小传感器的温度系数，将敏感单元、中空石英管及镀金光纤通过CO2激光熔接技术进行熔接，从而实现全石英结构光纤压力传感器的制作。对制作的传感器进行了高温静压及常温动压测试，高温静压实验结果表明传感器能在800 ℃，1 MPa温压环境下正常工作，且传感器表现出了良好的高温稳定性及超低温度系数（0.069 nm/℃）。常温动压测试结果表明传感器能实现2 kHz的动态压力测量。由于该种传感器具有全石英无胶粘结构，可批量化制造敏感单元以及超低温度系数的优点，使得该种全石英光纤法布里-珀罗动态压力传感器在高温环境下的动态压力测量领域具有潜在的应用潜力。
光纤传感器 法布里-珀罗 干涉 石英 压力测量 Fiber optics sensors Fabry-Perot Interferometry Silica Pressure measurement
Author Affiliations
Abstract
1 Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China
2 Department of Physics, Taiyuan Normal University, Jinzhong 030619, China
3 Institute of Computational and Applied Physics, Taiyuan Normal University, Jinzhong 030619, China
This paper presents an all-SiC fiber-optic Fabry-Perot (FP) pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment. The operating principle, fabrication, interface characteristics, and pressure response test of the proposed all-SiC pressure sensor are discussed. The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers, including a thinned SiC diaphragm and a SiC wafer with an etched cavity. White light interference is used for the detection and demodulation of the sensor pressure signals. Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa. The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.
SiC pressure sensor optical-fiber high temperature direct bonding Photonic Sensors
2022, 12(2): 130
1 中北大学 仪器科学与动态测试教育部重点实验室，山西 太原 030051
2 北京宇航系统工程研究所，北京 100171
3 北京首都航天机械有限公司，北京 100076
针对当前国产光离子气体传感器因精度较小、成本较高而一直无法广泛应用的技术难点问题，提出了一种通过改进结构将射频紫外灯驱动模块和微弱电流检测模块分离的方法。基于光离子化和抗电磁干扰的机理，深入探讨了传感机制和减弱噪声的方法，设计研制电源模块、紫外灯驱动模块和微弱电流检测模块等解调电路模块。设计特殊的外壳结构，使之在屏蔽外界干扰的同时，也降低了高压交流电给微弱电流检测模块带来的噪声干扰，进而提高了传感器的测试精度。构建了整体传感器的测试与标定系统。理论与实验结果表明：该传感器线性度良好，重复性为1.8%，在室温下工作稳定，可以应用到环境测量中。同时，所设计的传感器因其体积小、灵敏度高和响应快等优点，为其使用的便捷性和测量的实时性提供了可靠的解决方案。
光离子化 解调电路 电磁干扰 降噪 photoionization demodulator circuit electromagnetic interference noise reduction 红外与激光工程
2020, 49(8): 20190576
1 中北大学仪器科学与动态测试教育部重点实验室， 山西 太原 030051
2 中北大学电子测试技术国防科技重点实验室， 山西 太原 030051
利用355 nm全固态紫外激光对硼硅玻璃进行了直写刻蚀实验，采用单一变量法探究了激光能量密度、重复频率、扫描速度、扫描间距、扫描次数对刻蚀结果的影响。研究结果表明，激光能量密度过大时，玻璃易发生严重的崩边裂损现象; 等离子体屏蔽效应随激光能量密度的增大而增强，刻蚀深度减小; 随着重复频率的减小，通道边缘碎裂的现象减轻，刻蚀深度增大; 减小扫描间距可有效改善沟道底面的平整度; 刻蚀深度随扫描次数的增多而增大，同时沟道锥度增大。在较优的加工参数下，实现了宽度为84.8 μm，刻蚀深度为178 μm，底面较平整，沟道垂直度达89.580°的L型微通道的直写刻蚀。
激光技术 激光制造 全固态紫外激光 硼硅玻璃 微通道刻蚀
Author Affiliations
Abstract
1 Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, 030051, China
2 Key Laboratory Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, 030051, China
3 Department of Automation, Shanxi University, 030006, China
A new demodulation algorithm of the fiber-optic Fabry-Perot cavity length based on the phase generated carrier (PGC) is proposed in this paper, which can be applied in the high-temperature pressure sensor. This new algorithm based on arc tangent function outputs two orthogonal signals by utilizing an optical system, which is designed based on the field-programmable gate array (FPGA) to overcome the range limit of the original PGC arc tangent function demodulation algorithm. The simulation and analysis are also carried on. According to the analysis of demodulation speed and precision, the simulation of different numbers of sampling points, and measurement results of the pressure sensor, the arc tangent function demodulation method has good demodulation results: 1 MHz processing speed of single data and less than 1% error showing practical feasibility in the fiber-optic Fabry-Perot cavity length demodulation of the Fabry-Perot high-temperature pressure sensor.
Arc tangent Arc tangent Fabry-Perot Fabry-Perot demodulation demodulation pressure sensor pressure sensor Photonic Sensors
2017, 7(3): 234
Author Affiliations
Abstract
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan, 030051, China
The macro-bending induced optical fiber cladding modes frustrated total internal reflection effect is used to realize the liquid level probe with a simple structure of single macro-bend polymer optical fiber loop. The test results show that the extinction ratio reaches 1.06 dB. “First bath” phenomenon is not obvious (about 0.8%). The robustness of the sensor is better, and the ability of anti-pollution is stronger compared with the conventional sensors. The process of making this sensing probe is extremely easy, and the cost is very low.
Water leakage measurement polymer optical fiber frustrated total internal reflection Photonic Sensors
2016, 6(4): 312
Author Affiliations
Abstract
1 Science and Technology on Inertial Laboratory, Beihang University, Beijing 100191, China
2 Precision Opto-mechatronics Technology Key Laboratory of Education Ministry, Beihang University, Beijing 100191, China
3 Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China
4 Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China
Preparation and characterization of a liquid level sensor based on macro-bending coupling of fibers are demonstrated in this Letter. The sensitive component can be obtained through a twisting and twining structure of transparent cladding plastic fibers. The difference in light power originating from the surrounding media in the fibers is tested. The light power loss for different tested media and the fiber bending magnitude are investigated. The sensing measurements show that the coupling light power in the passive fiber decreases in accordance with increasing liquid level, whereas it exhibits a steady tendency in the case of the active fiber.
060.2370 Fiber optics sensors 060.2400 Fiber properties 060.2270 Fiber characterization 040.1880 Detection Chinese Optics Letters
2015, 13(8): 080601
中北大学 仪器与电子学院, 山西 太原 030051
针对半导体激光器稳频技术中的饱和吸收法、塞曼调制法、基于原子二向色性的激光器锁定(DAVLL)法和去除多普勒背景的二向色性锁定(DFDL)法4种典型稳频方法进行了稳定性、操作性、抗干扰能力等方面的对比分析,概括了调制和非调制稳频方法的优缺点,为相关实验选择合适的稳频方法提供依据。
半导体激光器 稳频 频率调制 非调制 semiconductor laser frequency stabilization frequency modulation non-modulation
